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Subject: Wafer characterization

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Posts:100

12/04/2006 11:45 AM Alert 
I want to know about your Autofocus Stage Control (Clemex ST-2000), motion range, and resolution for wafer characterization analysis?
hostUser is Offline

Posts:100

12/04/2006 11:46 AM Alert 
The Clemex Stage Controller (St-2000) could be used to control the motorized stage and focus on your microscope. At an accuracy of less then 1 micron(0.5), it is very precise. Usually the stage comes in sizes of 75*50 MM 100*100 MM, 200*100 MM for metallurgical applications. However other stages of 200x200, 300*300, 500x500mm and more are available for wafer characterization.

If you have further questions, please contact us.

Clemex Technologies
www.clemex.com
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Forums > Forum and FAQ > Stage Control ST-2000 > Wafer characterization



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